UL3000 Fab Series Helium Leak Detector

Revolutionize Vacuum & Semi Fab Testing: Ultra-Sensitive Leak Detection with UL3000 Fab Dry + ULTRATEST sensor technology.

UL3000 FAB ULTRA

The INFICON UL3000 Fab is specifically designed for the needs of leak checking in semiconductor applications.

It features flexibility, mobility, fast start-up, high sensitivity, fast and precise test results, and reliability.

  • Faster pump down (evacuation) times due to higher air pumping speed.
  • Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to reach sensitive measurement ranges quickly.
  • The UL3000 Fab ULTRA also offers an improved sniffer capability by using the well-proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.

Fast Results

The improved vacuum system with low-maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs.

 

Rotatable Display & Remote Controllable User Interface

The new touchscreen display shows test results and status information even from a long distance. Easy operation via user-guided menu structure, even for inexperienced operators. The wireless control of the UL3000 Fab (ULTRA) is possible via smartphone or tablet – without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.

Slim Design for Advanced Maneuverability

A low center of gravity, big wheels, ergonomically designed handle, and slim housing enable good mobility of the UL3000 Fab (ULTRA) even in tight spaces.

 

 Specifications   UL3000 Fab UL3000 Fab ULTRA
Min. detectable leak rate for He (Vacuum Mode) mbar L/ sec < 5. 10-12
Min. detectable leak rate for He (Sniffer Mode) mbar L/ sec < 5 . 10-8
Max. Inlet pressure Massive mode mbar 1000
Pumping Speed during evacuation m3/hr > 32 > 36
He pumping speed (hi sensitive ULTRA mode) L/sec 4
Response Time sec < 1
Time until ready for operation min < 3
Detectable masses (H2, 3He, He)   2, 3, 4 amu
Filaments ion source Iridium/ Yttria oxide coated   2
Test Port DN 25 KF
Adjustable Triggers   4
Interface   2 x USB, Ethernet/ LAN
Supply Voltage (50/60 Hz) VAC 100 to 240
Power Consumption VA typical 700, max 1,500
Dimension (L x W x H)  mm 1,050 x 472 x 987
Dimension (L x W x H) inch 45 x 21 x 34
Weight kg 118 132
Permissible Ambient Temperature Range deg C 10 to 40
Additional Features   HYDRO.S, separate sniffer line SL3000 port

 

 

Applicable in:

  • Battery – from electrode production to end-of-line testing
  • Energy – Oil and Gas Production
  • HVAC/R -Refrigeration & Air Conditioning
  • Mobility & Automotive
  • Semiconductor IDM & Foundry
  • Semiconductor Tool Manufacturing
  • Vacuum Coating
  • Save Time with I·CAL software algorithm for fast measurements in the range of 10-9 to 10-12 mbar·l/s.
  • Most efficient leak checking using I·ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity.
  • Applicable for vacuum and sniffer leak search.
  • Minimize leak-checking efforts through quick evacuation and response time.
  • Time is saved by easy maneuverability through slim design.
  • Low total cost of ownership (TCO) enabled by robust ion source (3-year warranty) and counterflow vacuum system.
  • Easy to use, operator-guided HMI with full color high-resolution rotatable display.
  • UL3000 Fab ULTRA: Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to reach sensitive measurement ranges quickly.
  • UL3000 Fab ULTRA: Faster pump down (evacuation) times due to higher air pumping speed of roots pump.
  • UL3000 Fab ULTRA: Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • UL3000 Fab ULTRA: The leak detector offers also an improved sniffer capability by using the well-proven sniffer line SL3000 which has up to 10 m in length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.
File Language Filesize Download
UL3000 Fab Operating Instructions EN ∼ 3190 KB pdf download
UL3000 Fab Ultra Operating Instructions EN ∼ 3600 KB pdf download
BM1000 Operating Manual EN ∼ 735 KB pdf download
RC1000 Operating Instructions EN ∼ 2120 KB pdf download
TC1000 Operating Instructions EN ∼ 354 KB pdf download

 

 

550-260 UL3000 Fab ULTRA
550-200 UL3000 Fab

 

 

551-010 Remote Control RC1000C, wired with 4m coiled cable
551-202 Vacuum Hose Holder for UL3000 Fab (inc. ULTRA version)
525-001 SL3000-3, sniffer line 3m length
525-002 SL3000-5, sniffer line 5m length
 525-003 SL3000-10, sniffer line 10m length
551-203 Bracket for SL3000
551-210 SL200, Sniffer line + el extension for UL3000
551-201 Helium Bottle Holder
560-310 I/O 1000 module
560-315 BM1000 Profibus Module
560-316 BM1000 ProfiNET IO Module
560-317 BM1000 DeviceNet Module
560-318 BM1000 Ethernet/ IP Module
560-334 Data Cable for IO1000, BM1000, 0.5m
560-332 Data Cable, 2m
560-335 Data Cable, 5m
560-340 Data Cable, 10m
551-005 TC1000 Test Chamber, DN25 KF, ESD wrist band
551-205 Extension Cable for TC1000/SL200, UL3000

 

 

200007656 Airfilter Kit UL3 Housing Ventilation

 

For more information, you may visit INFICON UL3000 Fab Series Helium Leak Detector.

Other INFICON Products

Protec P3000(XL)

Full-time Sniffing Applications

UL 1000 FAB

Economic vacuum leak testing

UL6000 FAB

Meet most critical & demanding leak detection

Providing the Best Values & Solutions is

Our Mission

(065) 6251-3383

sales@techgate.com.sg

18 Boon Lay Way #02-105D, TradeHUB 21, Singapore 609966