UL1000 Fab Helium Leak Detector
The UL1000 Fab “Dry” Standard for Vacuum Leak Testing in Industrial Vacuum and Semiconductor Manufacturing coupled with ULTRATEST sensor technology.
The INFICON UL1000 Fab Helium Leak Detector is the renowned standard when it comes to economic helium vacuum leak testing in industrial or semiconductor environments.
Potential contamination of the tested parts or equipment by carbon-hydrogen compounds or particles is eliminated through the instrument’s dry pump technology. The UL1000 Fab provides the best compromise between high performance, unparalleled robustness, and affordability. It provides state-of-the-art detection limits of 10-12 mbar*l/s combined with reasonable short pump down and response time. The compact design provides high maneuverability allowing easy access to maintenance areas with restricted space. The selectable background suppression (iZERO) enables continuous leak testing within at least two decades lower than existing background levels.
All features enable you to shorten the time of your leak testing efforts while assuring that all leaks can be identified at an economic scale.
| Min. detectable leak rate for He (Vacuum Mode) | mbar L/ sec | < 5. 10-12 |
| Min. detectable leak rate for He (Sniffer Mode) | mbar L/ sec | < 5 . 10-8 |
| Max. Inlet pressure FINE mode | mbar | 2 |
| Max. Inlet pressure ULTRA mode | mbar | 0.4 |
| Pumping Speed during evacuation | m3/hr | 25 @ 50Hz |
| He pumping speed ULTRA mode | L/sec | 2.5 |
| Detectable masses | 2, 3, 4 amu | |
| Mass spectrometer sector field | 180° | |
| Filaments ion source Iridium/ Yttria coated | 2 | |
| Calibrated built-in leak | mbar L/sec | ∼ 10-7 |
| Test port | DN 25 KF | 1 |
| Adjustable triggers | 2 | |
| Interface | RS 232 | |
| Chart recorder output | V | 2 x 10 |
| Input/ Output | PLC Compatible | |
| Permissible Ambient Temperature | °C | +10 to +40 |
| Weight | kg | 110 |
| Dimension (L x W x H) | mm | 1050 x 472 x 987 |
| Supply Voltage (EU) | V (ac) | 230 (±10%) 50 |
| Supply Voltage (US) | V (ac) | 100/115 (±10%) 50/60 |
| Power Consumption (typ.) | VA | 1100 |
| Power Consumption (max.) | VA | 1100 |
Applicable in:
- Industrial vacuum equipment manufacturing with high demand for cleanliness
- Vacuum components or sub-assemblies before they are installed in existing tools
- Maintenance work on vacuum tools, with or without support from their pump
- Inspections and installations of process gas systems
- Semiconductor, flat panel display or solar cell manufacturing
- Minimize leak testing efforts through quick pump down and response time.
- Avoid need for multiple leak tests by using selectable background suppression (iZERO).
- Enable easy access to maintenance areas with restricted space through maneuverable design.
- Low total cost of ownership (TCO) enabled by robust 2 hot filaments ion source (3 years warranty) and counterflow vacuum system.
- Easy to use with rotable display, optical and audible leak indication, and optional remote control.
- Low maintenance via a built-in test leak with auto-calibration procedure.
| File | Language | Filesize | Download |
| UL1000 Fab Operation | EN | ∼ 2000 KB |  |
| 550-100A | UL1000 Fab, 230V AC, EU Plug |
| 550-101A | UL1000 Fab, 100/115V AC, US Plug |
| 14022 | Extension cable for remote control RC1000, 8m length |
| 551-000 | Toolbox, detachable, for UL1000 |
| 551-001 | Helium Bottle Holder for UL1000/5000 |
| 551-002 | ESD Mat for UL1000/5000 |
| 551-005 | TC1000Test Chamber, DN25KF, ESD wrist band |
| 551-010 | Remote Control RC1000C, wired, with 4m coiled cable |
| 551-015 | Remote Control RC1000WL, wireless, incl. wireless transmitter |
| 551-020 | Wireless Transmitter for RC1000WL |
For more information, you may visit INFICON UL1000 Fab Helium Leak Detector.
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