UL3000 Fab Series Helium Leak Detector
Revolutionize Vacuum & Semi Fab Testing: Ultra-Sensitive Leak Detection with UL3000 Fab Dry + ULTRATEST sensor technology.
The INFICON UL3000 Fab is specifically designed for the needs of leak checking in semiconductor applications.
It features flexibility, mobility, fast start-up, high sensitivity, fast and precise test results, and reliability.
- Faster pump down (evacuation) times due to higher air pumping speed.
- Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
- Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to reach sensitive measurement ranges quickly.
- The UL3000 Fab ULTRA also offers an improved sniffer capability by using the well-proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.
Fast Results
The improved vacuum system with low-maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs.
Rotatable Display & Remote Controllable User Interface
The new touchscreen display shows test results and status information even from a long distance. Easy operation via user-guided menu structure, even for inexperienced operators. The wireless control of the UL3000 Fab (ULTRA) is possible via smartphone or tablet – without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.
Slim Design for Advanced Maneuverability
A low center of gravity, big wheels, ergonomically designed handle, and slim housing enable good mobility of the UL3000 Fab (ULTRA) even in tight spaces.
| Specifications | UL3000 Fab | UL3000 Fab ULTRA | |
| Min. detectable leak rate for He (Vacuum Mode) | mbar L/ sec | < 5. 10-12 | |
| Min. detectable leak rate for He (Sniffer Mode) | mbar L/ sec | < 5 . 10-8 | |
| Max. Inlet pressure Massive mode | mbar | 1000 | |
| Pumping Speed during evacuation | m3/hr | > 32 | > 36 |
| He pumping speed (hi sensitive ULTRA mode) | L/sec | 4 | |
| Response Time | sec | < 1 | |
| Time until ready for operation | min | < 3 | |
| Detectable masses (H2, 3He, He) | 2, 3, 4 amu | ||
| Filaments ion source Iridium/ Yttria oxide coated | 2 | ||
| Test Port | DN | 25 KF | |
| Adjustable Triggers | 4 | ||
| Interface | 2 x USB, Ethernet/ LAN | ||
| Supply Voltage (50/60 Hz) | VAC | 100 to 240 | |
| Power Consumption | VA | typical 700, max 1,500 | |
| Dimension (L x W x H) | mm | 1,050 x 472 x 987 | |
| Dimension (L x W x H) | inch | 45 x 21 x 34 | |
| Weight | kg | 118 | 132 |
| Permissible Ambient Temperature Range | deg C | 10 to 40 | |
| Additional Features | – | HYDRO.S, separate sniffer line SL3000 port | |
Applicable in:
- Battery – from electrode production to end-of-line testing
- Energy – Oil and Gas Production
- HVAC/R -Refrigeration & Air Conditioning
- Mobility & Automotive
- Semiconductor IDM & Foundry
- Semiconductor Tool Manufacturing
- Vacuum Coating
- Save Time with I·CAL software algorithm for fast measurements in the range of 10-9 to 10-12 mbar·l/s.
- Most efficient leak checking using I·ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity.
- Applicable for vacuum and sniffer leak search.
- Minimize leak-checking efforts through quick evacuation and response time.
- Time is saved by easy maneuverability through slim design.
- Low total cost of ownership (TCO) enabled by robust ion source (3-year warranty) and counterflow vacuum system.
- Easy to use, operator-guided HMI with full color high-resolution rotatable display.
- UL3000 Fab ULTRA: Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to reach sensitive measurement ranges quickly.
- UL3000 Fab ULTRA: Faster pump down (evacuation) times due to higher air pumping speed of roots pump.
- UL3000 Fab ULTRA: Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
- UL3000 Fab ULTRA: The leak detector offers also an improved sniffer capability by using the well-proven sniffer line SL3000 which has up to 10 m in length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.
| File | Language | Filesize | Download |
| UL3000 Fab Operating Instructions | EN | ∼ 3190 KB |  |
| UL3000 Fab Ultra Operating Instructions | EN | ∼ 3600 KB | |
| BM1000 Operating Manual | EN | ∼ 735 KB | |
| RC1000 Operating Instructions | EN | ∼ 2120 KB | |
| TC1000 Operating Instructions | EN | ∼ 354 KB | |
| 550-260 | UL3000 Fab ULTRA |
| 550-200 | UL3000 Fab |
| 551-010 | Remote Control RC1000C, wired with 4m coiled cable |
| 551-202 | Vacuum Hose Holder for UL3000 Fab (inc. ULTRA version) |
| 525-001 | SL3000-3, sniffer line 3m length |
| 525-002 | SL3000-5, sniffer line 5m length |
| 525-003 | SL3000-10, sniffer line 10m length |
| 551-203 | Bracket for SL3000 |
| 551-210 | SL200, Sniffer line + el extension for UL3000 |
| 551-201 | Helium Bottle Holder |
| 560-310 | I/O 1000 module |
| 560-315 | BM1000 Profibus Module |
| 560-316 | BM1000 ProfiNET IO Module |
| 560-317 | BM1000 DeviceNet Module |
| 560-318 | BM1000 Ethernet/ IP Module |
| 560-334 | Data Cable for IO1000, BM1000, 0.5m |
| 560-332 | Data Cable, 2m |
| 560-335 | Data Cable, 5m |
| 560-340 | Data Cable, 10m |
| 551-005 | TC1000 Test Chamber, DN25 KF, ESD wrist band |
| 551-205 | Extension Cable for TC1000/SL200, UL3000 |
| 200007656 | Airfilter Kit UL3 Housing Ventilation |
For more information, you may visit INFICON UL3000 Fab Series Helium Leak Detector.
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